UTC:2022/01/18 00:53:09.478:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:09.478:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:09.593:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300922) out of limit(mm)=0.3
UTC:2022/01/18 00:53:09.593:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69908(mm)
UTC:2022/01/18 00:53:09.708:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:09.708:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:09.825:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301532) out of limit(mm)=0.3
UTC:2022/01/18 00:53:09.825:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69847(mm)
UTC:2022/01/18 00:53:09.940:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:09.940:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:09.055:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:09.055:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:09.171:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:09.171:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:09.287:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301227) out of limit(mm)=0.3
UTC:2022/01/18 00:53:09.287:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69877(mm)
UTC:2022/01/18 00:53:09.305:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:09.305:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:10.401:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:10.401:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:10.403:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300922) out of limit(mm)=0.3
UTC:2022/01/18 00:53:10.403:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69908(mm)
UTC:2022/01/18 00:53:10.517:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:10.517:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:10.633:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:10.633:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:10.749:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301837) out of limit(mm)=0.3
UTC:2022/01/18 00:53:10.749:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69816(mm)
UTC:2022/01/18 00:53:10.864:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300922) out of limit(mm)=0.3
UTC:2022/01/18 00:53:10.864:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69908(mm)
UTC:2022/01/18 00:53:10.886:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:10.886:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:10.980:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302753) out of limit(mm)=0.3
UTC:2022/01/18 00:53:10.980:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69725(mm)
UTC:2022/01/18 00:53:10.094:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:10.094:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:10.211:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301837) out of limit(mm)=0.3
UTC:2022/01/18 00:53:10.211:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69816(mm)
UTC:2022/01/18 00:53:10.325:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:10.325:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:11.441:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:11.441:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:11.557:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301227) out of limit(mm)=0.3
UTC:2022/01/18 00:53:11.557:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69877(mm)
UTC:2022/01/18 00:53:11.583:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:11.583:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:11.673:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301227) out of limit(mm)=0.3
UTC:2022/01/18 00:53:11.673:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69877(mm)
UTC:2022/01/18 00:53:11.788:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:11.788:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:11.904:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300922) out of limit(mm)=0.3
UTC:2022/01/18 00:53:11.904:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69908(mm)
UTC:2022/01/18 00:53:11.020:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301227) out of limit(mm)=0.3
UTC:2022/01/18 00:53:11.020:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69877(mm)
UTC:2022/01/18 00:53:11.136:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301227) out of limit(mm)=0.3
UTC:2022/01/18 00:53:11.136:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69877(mm)
UTC:2022/01/18 00:53:11.252:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.303058) out of limit(mm)=0.3
UTC:2022/01/18 00:53:11.252:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69694(mm)
UTC:2022/01/18 00:53:12.367:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300922) out of limit(mm)=0.3
UTC:2022/01/18 00:53:12.367:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69908(mm)
UTC:2022/01/18 00:53:12.482:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:12.482:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:12.598:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:12.598:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:12.715:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.303058) out of limit(mm)=0.3
UTC:2022/01/18 00:53:12.715:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69694(mm)
UTC:2022/01/18 00:53:12.830:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:12.830:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:12.946:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300922) out of limit(mm)=0.3
UTC:2022/01/18 00:53:12.946:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69908(mm)
UTC:2022/01/18 00:53:12.062:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301532) out of limit(mm)=0.3
UTC:2022/01/18 00:53:12.062:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69847(mm)
UTC:2022/01/18 00:53:12.177:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:12.177:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:12.294:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301837) out of limit(mm)=0.3
UTC:2022/01/18 00:53:12.294:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69816(mm)
UTC:2022/01/18 00:53:13.410:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301837) out of limit(mm)=0.3
UTC:2022/01/18 00:53:13.410:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69816(mm)
UTC:2022/01/18 00:53:13.525:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:13.525:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:13.642:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301532) out of limit(mm)=0.3
UTC:2022/01/18 00:53:13.642:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69847(mm)
UTC:2022/01/18 00:53:13.757:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:13.757:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:13.874:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.303363) out of limit(mm)=0.3
UTC:2022/01/18 00:53:13.874:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69664(mm)
UTC:2022/01/18 00:53:13.989:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300922) out of limit(mm)=0.3
UTC:2022/01/18 00:53:13.989:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69908(mm)
UTC:2022/01/18 00:53:13.105:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:13.105:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:13.221:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:13.221:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:14.337:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300922) out of limit(mm)=0.3
UTC:2022/01/18 00:53:14.337:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69908(mm)
UTC:2022/01/18 00:53:14.454:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.303974) out of limit(mm)=0.3
UTC:2022/01/18 00:53:14.454:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69603(mm)
UTC:2022/01/18 00:53:14.569:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:14.569:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:14.685:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301837) out of limit(mm)=0.3
UTC:2022/01/18 00:53:14.685:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69816(mm)
UTC:2022/01/18 00:53:14.801:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301837) out of limit(mm)=0.3
UTC:2022/01/18 00:53:14.801:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69816(mm)
UTC:2022/01/18 00:53:14.917:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:14.917:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:14.033:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300922) out of limit(mm)=0.3
UTC:2022/01/18 00:53:14.033:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69908(mm)
UTC:2022/01/18 00:53:14.149:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:14.149:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:14.265:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:14.265:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:15.382:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.304889) out of limit(mm)=0.3
UTC:2022/01/18 00:53:15.382:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69511(mm)
UTC:2022/01/18 00:53:15.498:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302753) out of limit(mm)=0.3
UTC:2022/01/18 00:53:15.498:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69725(mm)
UTC:2022/01/18 00:53:15.613:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:15.613:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:15.729:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:15.729:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:15.845:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:15.845:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:15.962:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.303058) out of limit(mm)=0.3
UTC:2022/01/18 00:53:15.962:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69694(mm)
UTC:2022/01/18 00:53:15.077:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:15.077:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:15.193:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300922) out of limit(mm)=0.3
UTC:2022/01/18 00:53:15.193:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69908(mm)
UTC:2022/01/18 00:53:15.310:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302753) out of limit(mm)=0.3
UTC:2022/01/18 00:53:15.310:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69725(mm)
UTC:2022/01/18 00:53:16.425:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:16.425:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:16.541:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:16.541:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:16.658:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301532) out of limit(mm)=0.3
UTC:2022/01/18 00:53:16.658:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69847(mm)
UTC:2022/01/18 00:53:16.773:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:16.773:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:16.890:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301837) out of limit(mm)=0.3
UTC:2022/01/18 00:53:16.890:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69816(mm)
UTC:2022/01/18 00:53:16.006:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301837) out of limit(mm)=0.3
UTC:2022/01/18 00:53:16.006:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69816(mm)
UTC:2022/01/18 00:53:16.122:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.303058) out of limit(mm)=0.3
UTC:2022/01/18 00:53:16.122:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69694(mm)
UTC:2022/01/18 00:53:16.237:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:16.237:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:17.354:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301532) out of limit(mm)=0.3
UTC:2022/01/18 00:53:17.354:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69847(mm)
UTC:2022/01/18 00:53:17.470:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302448) out of limit(mm)=0.3
UTC:2022/01/18 00:53:17.470:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69755(mm)
UTC:2022/01/18 00:53:17.586:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301532) out of limit(mm)=0.3
UTC:2022/01/18 00:53:17.586:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69847(mm)
UTC:2022/01/18 00:53:17.701:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:17.701:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:17.818:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301227) out of limit(mm)=0.3
UTC:2022/01/18 00:53:17.818:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69877(mm)
UTC:2022/01/18 00:53:17.934:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:17.934:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:17.050:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300922) out of limit(mm)=0.3
UTC:2022/01/18 00:53:17.050:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69908(mm)
UTC:2022/01/18 00:53:17.166:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:17.166:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:17.285:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:17.285:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:17.285:PMC tracking error (3023004): XBOT ID:2(2)-Rx Axis control error(-20.0917) out of limit(mrad)=20
UTC:2022/01/18 00:53:17.285:XBOT ID:2-Rx Axis---Ref=-26.1799(mrad);Fb=-6.08826(mrad)
UTC:2022/01/18 00:53:17.287:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.303669) out of limit(mm)=0.3
UTC:2022/01/18 00:53:17.287:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69633(mm)
UTC:2022/01/18 00:53:17.332:PMC tracking error (3022004): XBOT ID:2(2)-Z Axis control error(0.323836) out of limit(mm)=0.3
UTC:2022/01/18 00:53:17.332:XBOT ID:2-Z Axis---Ref=3(mm);Fb=2.67616(mm)
UTC:2022/01/18 00:53:18.402:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:18.402:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:18.455:PMC tracking error (3022004): XBOT ID:2(2)-Z Axis control error(0.307967) out of limit(mm)=0.3
UTC:2022/01/18 00:53:18.455:XBOT ID:2-Z Axis---Ref=3(mm);Fb=2.69203(mm)
UTC:2022/01/18 00:53:18.519:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:18.519:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:18.595:PMC tracking error (3022004): XBOT ID:2(2)-Z Axis control error(0.305525) out of limit(mm)=0.3
UTC:2022/01/18 00:53:18.595:XBOT ID:2-Z Axis---Ref=3(mm);Fb=2.69447(mm)
UTC:2022/01/18 00:53:18.636:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:18.636:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:18.717:PMC tracking error (3022004): XBOT ID:2(2)-Z Axis control error(0.309493) out of limit(mm)=0.3
UTC:2022/01/18 00:53:18.717:XBOT ID:2-Z Axis---Ref=3(mm);Fb=2.69051(mm)
UTC:2022/01/18 00:53:18.752:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:18.752:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:18.754:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302753) out of limit(mm)=0.3
UTC:2022/01/18 00:53:18.754:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69725(mm)
UTC:2022/01/18 00:53:18.848:PMC tracking error (3022004): XBOT ID:2(2)-Z Axis control error(0.304915) out of limit(mm)=0.3
UTC:2022/01/18 00:53:18.848:XBOT ID:2-Z Axis---Ref=3(mm);Fb=2.69508(mm)
UTC:2022/01/18 00:53:18.869:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:18.869:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:18.984:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:18.984:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:18.994:PMC tracking error (3022004): XBOT ID:2(2)-Z Axis control error(0.304) out of limit(mm)=0.3
UTC:2022/01/18 00:53:18.994:XBOT ID:2-Z Axis---Ref=3(mm);Fb=2.696(mm)
UTC:2022/01/18 00:53:18.099:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:18.099:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:18.120:PMC tracking error (3022004): XBOT ID:2(2)-Z Axis control error(0.300338) out of limit(mm)=0.3
UTC:2022/01/18 00:53:18.120:XBOT ID:2-Z Axis---Ref=3(mm);Fb=2.69966(mm)
UTC:2022/01/18 00:53:18.216:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301837) out of limit(mm)=0.3
UTC:2022/01/18 00:53:18.216:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69816(mm)
UTC:2022/01/18 00:53:18.249:PMC tracking error (3022004): XBOT ID:2(2)-Z Axis control error(0.300032) out of limit(mm)=0.3
UTC:2022/01/18 00:53:18.249:XBOT ID:2-Z Axis---Ref=3(mm);Fb=2.69997(mm)
UTC:2022/01/18 00:53:19.332:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:19.332:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:19.448:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:19.448:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:19.564:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301227) out of limit(mm)=0.3
UTC:2022/01/18 00:53:19.564:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69877(mm)
UTC:2022/01/18 00:53:19.680:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:19.680:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:19.797:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302753) out of limit(mm)=0.3
UTC:2022/01/18 00:53:19.797:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69725(mm)
UTC:2022/01/18 00:53:19.912:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:19.912:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:19.028:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:19.028:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:19.145:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.303058) out of limit(mm)=0.3
UTC:2022/01/18 00:53:19.145:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69694(mm)
UTC:2022/01/18 00:53:19.261:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:19.261:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:20.378:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301532) out of limit(mm)=0.3
UTC:2022/01/18 00:53:20.378:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69847(mm)
UTC:2022/01/18 00:53:20.494:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302448) out of limit(mm)=0.3
UTC:2022/01/18 00:53:20.494:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69755(mm)
UTC:2022/01/18 00:53:20.610:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:20.610:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:20.727:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301532) out of limit(mm)=0.3
UTC:2022/01/18 00:53:20.727:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69847(mm)
UTC:2022/01/18 00:53:20.843:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:20.843:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:20.959:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300922) out of limit(mm)=0.3
UTC:2022/01/18 00:53:20.959:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69908(mm)
UTC:2022/01/18 00:53:20.076:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302143) out of limit(mm)=0.3
UTC:2022/01/18 00:53:20.076:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69786(mm)
UTC:2022/01/18 00:53:20.192:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302143) out of limit(mm)=0.3
UTC:2022/01/18 00:53:20.192:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69786(mm)
UTC:2022/01/18 00:53:20.308:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301227) out of limit(mm)=0.3
UTC:2022/01/18 00:53:20.308:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69877(mm)
UTC:2022/01/18 00:53:21.425:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302143) out of limit(mm)=0.3
UTC:2022/01/18 00:53:21.425:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69786(mm)
UTC:2022/01/18 00:53:21.541:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:21.541:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:21.658:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.303363) out of limit(mm)=0.3
UTC:2022/01/18 00:53:21.658:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69664(mm)
UTC:2022/01/18 00:53:21.774:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302753) out of limit(mm)=0.3
UTC:2022/01/18 00:53:21.774:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69725(mm)
UTC:2022/01/18 00:53:21.890:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:21.890:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:21.007:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301837) out of limit(mm)=0.3
UTC:2022/01/18 00:53:21.007:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69816(mm)
UTC:2022/01/18 00:53:21.123:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:21.123:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:21.240:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302448) out of limit(mm)=0.3
UTC:2022/01/18 00:53:21.240:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69755(mm)
UTC:2022/01/18 00:53:22.357:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.304889) out of limit(mm)=0.3
UTC:2022/01/18 00:53:22.357:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69511(mm)
UTC:2022/01/18 00:53:22.473:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301532) out of limit(mm)=0.3
UTC:2022/01/18 00:53:22.473:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69847(mm)
UTC:2022/01/18 00:53:22.590:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.303363) out of limit(mm)=0.3
UTC:2022/01/18 00:53:22.590:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69664(mm)
UTC:2022/01/18 00:53:22.706:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301532) out of limit(mm)=0.3
UTC:2022/01/18 00:53:22.706:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69847(mm)
UTC:2022/01/18 00:53:22.822:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:22.822:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:22.939:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:22.939:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:22.055:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:22.055:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:22.172:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302143) out of limit(mm)=0.3
UTC:2022/01/18 00:53:22.172:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69786(mm)
UTC:2022/01/18 00:53:22.289:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.303058) out of limit(mm)=0.3
UTC:2022/01/18 00:53:22.289:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69694(mm)
UTC:2022/01/18 00:53:23.405:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:23.405:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:23.522:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301227) out of limit(mm)=0.3
UTC:2022/01/18 00:53:23.522:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69877(mm)
UTC:2022/01/18 00:53:23.638:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300922) out of limit(mm)=0.3
UTC:2022/01/18 00:53:23.638:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69908(mm)
UTC:2022/01/18 00:53:23.755:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300922) out of limit(mm)=0.3
UTC:2022/01/18 00:53:23.755:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69908(mm)
UTC:2022/01/18 00:53:23.871:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:23.871:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:23.988:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301532) out of limit(mm)=0.3
UTC:2022/01/18 00:53:23.988:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69847(mm)
UTC:2022/01/18 00:53:23.105:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301837) out of limit(mm)=0.3
UTC:2022/01/18 00:53:23.105:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69816(mm)
UTC:2022/01/18 00:53:23.221:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301227) out of limit(mm)=0.3
UTC:2022/01/18 00:53:23.221:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69877(mm)
UTC:2022/01/18 00:53:24.338:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302753) out of limit(mm)=0.3
UTC:2022/01/18 00:53:24.338:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69725(mm)
UTC:2022/01/18 00:53:24.454:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300922) out of limit(mm)=0.3
UTC:2022/01/18 00:53:24.454:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69908(mm)
UTC:2022/01/18 00:53:24.571:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.303058) out of limit(mm)=0.3
UTC:2022/01/18 00:53:24.571:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69694(mm)
UTC:2022/01/18 00:53:24.687:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300922) out of limit(mm)=0.3
UTC:2022/01/18 00:53:24.687:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69908(mm)
UTC:2022/01/18 00:53:24.804:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.303058) out of limit(mm)=0.3
UTC:2022/01/18 00:53:24.804:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69694(mm)
UTC:2022/01/18 00:53:24.920:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:24.920:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:24.037:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302143) out of limit(mm)=0.3
UTC:2022/01/18 00:53:24.037:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69786(mm)
UTC:2022/01/18 00:53:24.153:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:24.153:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:24.270:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301837) out of limit(mm)=0.3
UTC:2022/01/18 00:53:24.270:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69816(mm)
UTC:2022/01/18 00:53:25.387:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302753) out of limit(mm)=0.3
UTC:2022/01/18 00:53:25.387:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69725(mm)
UTC:2022/01/18 00:53:25.503:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:25.503:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:25.620:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302448) out of limit(mm)=0.3
UTC:2022/01/18 00:53:25.620:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69755(mm)
UTC:2022/01/18 00:53:25.736:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:25.736:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:25.853:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302448) out of limit(mm)=0.3
UTC:2022/01/18 00:53:25.853:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69755(mm)
UTC:2022/01/18 00:53:25.969:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301837) out of limit(mm)=0.3
UTC:2022/01/18 00:53:25.969:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69816(mm)
UTC:2022/01/18 00:53:25.086:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302143) out of limit(mm)=0.3
UTC:2022/01/18 00:53:25.086:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69786(mm)
UTC:2022/01/18 00:53:25.203:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302143) out of limit(mm)=0.3
UTC:2022/01/18 00:53:25.203:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69786(mm)
UTC:2022/01/18 00:53:25.319:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300922) out of limit(mm)=0.3
UTC:2022/01/18 00:53:25.319:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69908(mm)
UTC:2022/01/18 00:53:26.436:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302448) out of limit(mm)=0.3
UTC:2022/01/18 00:53:26.436:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69755(mm)
UTC:2022/01/18 00:53:26.552:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301227) out of limit(mm)=0.3
UTC:2022/01/18 00:53:26.552:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69877(mm)
UTC:2022/01/18 00:53:26.669:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301227) out of limit(mm)=0.3
UTC:2022/01/18 00:53:26.669:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69877(mm)
UTC:2022/01/18 00:53:26.786:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.303363) out of limit(mm)=0.3
UTC:2022/01/18 00:53:26.786:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69664(mm)
UTC:2022/01/18 00:53:26.902:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:26.902:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:26.018:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:26.018:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:26.135:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:26.135:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:26.252:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300922) out of limit(mm)=0.3
UTC:2022/01/18 00:53:26.252:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69908(mm)
UTC:2022/01/18 00:53:27.368:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300617) out of limit(mm)=0.3
UTC:2022/01/18 00:53:27.368:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69938(mm)
UTC:2022/01/18 00:53:27.485:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301227) out of limit(mm)=0.3
UTC:2022/01/18 00:53:27.485:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69877(mm)
UTC:2022/01/18 00:53:27.601:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:27.601:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:27.718:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302143) out of limit(mm)=0.3
UTC:2022/01/18 00:53:27.718:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69786(mm)
UTC:2022/01/18 00:53:27.835:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302448) out of limit(mm)=0.3
UTC:2022/01/18 00:53:27.835:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69755(mm)
UTC:2022/01/18 00:53:27.951:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:27.951:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:27.068:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.303058) out of limit(mm)=0.3
UTC:2022/01/18 00:53:27.068:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69694(mm)
UTC:2022/01/18 00:53:27.185:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.304889) out of limit(mm)=0.3
UTC:2022/01/18 00:53:27.185:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69511(mm)
UTC:2022/01/18 00:53:27.301:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302753) out of limit(mm)=0.3
UTC:2022/01/18 00:53:27.301:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69725(mm)
UTC:2022/01/18 00:53:28.417:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:28.417:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:28.534:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300312) out of limit(mm)=0.3
UTC:2022/01/18 00:53:28.534:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69969(mm)
UTC:2022/01/18 00:53:28.651:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.302448) out of limit(mm)=0.3
UTC:2022/01/18 00:53:28.651:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69755(mm)
UTC:2022/01/18 00:53:28.767:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.300006) out of limit(mm)=0.3
UTC:2022/01/18 00:53:28.767:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69999(mm)
UTC:2022/01/18 00:53:28.884:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301227) out of limit(mm)=0.3
UTC:2022/01/18 00:53:28.884:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69877(mm)
UTC:2022/01/18 00:53:28.001:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301227) out of limit(mm)=0.3
UTC:2022/01/18 00:53:28.001:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69877(mm)
UTC:2022/01/18 00:53:28.138:PMC tracking error (3015003): XBOT ID:1(1)-Rz Axis control error(30.9974) out of limit(mrad)=30
UTC:2022/01/18 00:53:28.138:XBOT ID:1-Rz Axis---Ref=1431.17(mrad);Fb=1400.17(mrad)
UTC:2022/01/18 00:53:28.219:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.308246) out of limit(mm)=0.3
UTC:2022/01/18 00:53:28.219:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69175(mm)
UTC:2022/01/18 00:53:28.325:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301532) out of limit(mm)=0.3
UTC:2022/01/18 00:53:28.325:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69847(mm)
UTC:2022/01/18 00:53:29.464:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301227) out of limit(mm)=0.3
UTC:2022/01/18 00:53:29.464:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69877(mm)
UTC:2022/01/18 00:54:07.668:PMC tracking error (3015003): XBOT ID:1(1)-Rz Axis control error(30.12) out of limit(mrad)=30
UTC:2022/01/18 00:54:07.668:XBOT ID:1-Rz Axis---Ref=1431.17(mrad);Fb=1401.05(mrad)
UTC:2022/01/18 00:54:07.677:PMC tracking error (3025003): XBOT ID:2(2)-Rz Axis control error(-30.9097) out of limit(mrad)=30
UTC:2022/01/18 00:54:07.677:XBOT ID:2-Rz Axis---Ref=1710.42(mrad);Fb=1741.33(mrad)
UTC:2022/01/18 00:54:07.758:PMC tracking error (3025005): XBOT ID:2(2)-Rz Axis control error(-157.123) out of limit(mrad)=150
UTC:2022/01/18 00:54:07.758:XBOT ID:2-Rz Axis---Ref=1710.42(mrad);Fb=1867.55(mrad)
UTC:2022/01/18 00:54:07.973:PMC tracking error (3012003): XBOT ID:1(1)-Z Axis control error(0.509848) out of limit(mm)=0.5
UTC:2022/01/18 00:54:07.973:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.49015(mm)
UTC:2022/01/18 00:54:30.004:PMC tracking error (3022004): XBOT ID:2(2)-Z Axis control error(0.300032) out of limit(mm)=0.3
UTC:2022/01/18 00:54:30.004:XBOT ID:2-Z Axis---Ref=3(mm);Fb=2.69997(mm)
UTC:2022/01/18 00:54:30.027:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.303669) out of limit(mm)=0.3
UTC:2022/01/18 00:54:30.027:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69633(mm)
UTC:2022/01/18 00:54:30.141:PMC tracking error (3022004): XBOT ID:2(2)-Z Axis control error(0.300032) out of limit(mm)=0.3
UTC:2022/01/18 00:54:30.141:XBOT ID:2-Z Axis---Ref=3(mm);Fb=2.69997(mm)
UTC:2022/01/18 00:54:30.168:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.301532) out of limit(mm)=0.3
UTC:2022/01/18 00:54:30.168:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69847(mm)
UTC:2022/01/18 00:54:30.273:PMC tracking error (3022004): XBOT ID:2(2)-Z Axis control error(0.300032) out of limit(mm)=0.3
UTC:2022/01/18 00:54:30.273:XBOT ID:2-Z Axis---Ref=3(mm);Fb=2.69997(mm)
UTC:2022/01/18 00:54:31.414:PMC tracking error (3022004): XBOT ID:2(2)-Z Axis control error(0.300032) out of limit(mm)=0.3
UTC:2022/01/18 00:54:31.414:XBOT ID:2-Z Axis---Ref=3(mm);Fb=2.69997(mm)
UTC:2022/01/18 00:55:03.457:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.313129) out of limit(mm)=0.3
UTC:2022/01/18 00:55:03.457:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.68687(mm)
UTC:2022/01/18 00:55:11.856:PMC tracking error (3015003): XBOT ID:1(1)-Rz Axis control error(31.1958) out of limit(mrad)=30
UTC:2022/01/18 00:55:11.856:XBOT ID:1-Rz Axis---Ref=1431.17(mrad);Fb=1399.97(mrad)
UTC:2022/01/18 00:55:11.894:PMC error (2001001):Flyway 1 was shutdown due to flyway error(10-0)!
UTC:2022/01/18 00:55:12.181:Flyway 1---PMC error (200100c): 12V (11.99V) under voltage error!
UTC:2022/01/18 00:55:12.181:Flyway 1---PMC error (2001012): PMNET synchronization error!
UTC:2022/01/18 01:01:17.464:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.313567) out of limit(mm)=0.3
UTC:2022/01/18 01:01:17.464:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.68643(mm)
UTC:2022/01/18 01:01:17.554:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.31082) out of limit(mm)=0.3
UTC:2022/01/18 01:01:17.554:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.68918(mm)
UTC:2022/01/18 01:01:17.646:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.312651) out of limit(mm)=0.3
UTC:2022/01/18 01:01:17.646:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.68735(mm)
UTC:2022/01/18 01:01:17.739:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.324248) out of limit(mm)=0.3
UTC:2022/01/18 01:01:17.739:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.67575(mm)
UTC:2022/01/18 01:01:17.792:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(-0.300447) out of limit(mm)=0.3
UTC:2022/01/18 01:01:17.792:XBOT ID:1-Z Axis---Ref=3(mm);Fb=3.30045(mm)
UTC:2022/01/18 01:01:17.833:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.315093) out of limit(mm)=0.3
UTC:2022/01/18 01:01:17.833:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.68491(mm)
UTC:2022/01/18 01:01:17.883:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(-0.300447) out of limit(mm)=0.3
UTC:2022/01/18 01:01:17.883:XBOT ID:1-Z Axis---Ref=3(mm);Fb=3.30045(mm)
UTC:2022/01/18 01:01:17.928:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.316618) out of limit(mm)=0.3
UTC:2022/01/18 01:01:17.928:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.68338(mm)
UTC:2022/01/18 01:01:17.978:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(-0.309602) out of limit(mm)=0.3
UTC:2022/01/18 01:01:17.978:XBOT ID:1-Z Axis---Ref=3(mm);Fb=3.3096(mm)
UTC:2022/01/18 01:01:17.024:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.329131) out of limit(mm)=0.3
UTC:2022/01/18 01:01:17.024:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.67087(mm)
UTC:2022/01/18 01:01:17.073:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(-0.30533) out of limit(mm)=0.3
UTC:2022/01/18 01:01:17.073:XBOT ID:1-Z Axis---Ref=3(mm);Fb=3.30533(mm)
UTC:2022/01/18 01:01:17.121:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.363311) out of limit(mm)=0.3
UTC:2022/01/18 01:01:17.121:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.63669(mm)
UTC:2022/01/18 01:01:17.169:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(-0.311433) out of limit(mm)=0.3
UTC:2022/01/18 01:01:17.169:XBOT ID:1-Z Axis---Ref=3(mm);Fb=3.31143(mm)
UTC:2022/01/18 01:01:17.218:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.337065) out of limit(mm)=0.3
UTC:2022/01/18 01:01:17.218:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.66293(mm)
UTC:2022/01/18 01:01:17.266:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(-0.311128) out of limit(mm)=0.3
UTC:2022/01/18 01:01:17.266:XBOT ID:1-Z Axis---Ref=3(mm);Fb=3.31113(mm)
UTC:2022/01/18 01:01:17.316:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.351408) out of limit(mm)=0.3
UTC:2022/01/18 01:01:17.316:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.64859(mm)
UTC:2022/01/18 01:01:18.363:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(-0.30533) out of limit(mm)=0.3
UTC:2022/01/18 01:01:18.363:XBOT ID:1-Z Axis---Ref=3(mm);Fb=3.30533(mm)
UTC:2022/01/18 01:01:18.414:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.352629) out of limit(mm)=0.3
UTC:2022/01/18 01:01:18.414:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.64737(mm)
UTC:2022/01/18 01:01:18.460:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(-0.301057) out of limit(mm)=0.3
UTC:2022/01/18 01:01:18.460:XBOT ID:1-Z Axis---Ref=3(mm);Fb=3.30106(mm)
UTC:2022/01/18 01:01:18.512:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.364836) out of limit(mm)=0.3
UTC:2022/01/18 01:01:18.512:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.63516(mm)
UTC:2022/01/18 01:01:18.558:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(-0.30533) out of limit(mm)=0.3
UTC:2022/01/18 01:01:18.558:XBOT ID:1-Z Axis---Ref=3(mm);Fb=3.30533(mm)
UTC:2022/01/18 01:01:18.610:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.363921) out of limit(mm)=0.3
UTC:2022/01/18 01:01:18.610:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.63608(mm)
UTC:2022/01/18 01:01:18.656:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(-0.309297) out of limit(mm)=0.3
UTC:2022/01/18 01:01:18.656:XBOT ID:1-Z Axis---Ref=3(mm);Fb=3.3093(mm)
UTC:2022/01/18 01:01:18.708:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.356291) out of limit(mm)=0.3
UTC:2022/01/18 01:01:18.708:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.64371(mm)
UTC:2022/01/18 01:01:18.754:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(-0.302583) out of limit(mm)=0.3
UTC:2022/01/18 01:01:18.754:XBOT ID:1-Z Axis---Ref=3(mm);Fb=3.30258(mm)
UTC:2022/01/18 01:01:18.806:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.341033) out of limit(mm)=0.3
UTC:2022/01/18 01:01:18.806:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.65897(mm)
UTC:2022/01/18 01:01:18.853:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(-0.316316) out of limit(mm)=0.3
UTC:2022/01/18 01:01:18.853:XBOT ID:1-Z Axis---Ref=3(mm);Fb=3.31632(mm)
UTC:2022/01/18 01:01:18.904:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.325469) out of limit(mm)=0.3
UTC:2022/01/18 01:01:18.904:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.67453(mm)
UTC:2022/01/18 01:01:18.951:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(-0.312044) out of limit(mm)=0.3
UTC:2022/01/18 01:01:18.951:XBOT ID:1-Z Axis---Ref=3(mm);Fb=3.31204(mm)
UTC:2022/01/18 01:01:18.002:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.306548) out of limit(mm)=0.3
UTC:2022/01/18 01:01:18.002:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.69345(mm)
UTC:2022/01/18 01:01:18.049:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(-0.307771) out of limit(mm)=0.3
UTC:2022/01/18 01:01:18.049:XBOT ID:1-Z Axis---Ref=3(mm);Fb=3.30777(mm)
UTC:2022/01/18 01:01:18.102:PMC tracking error (3012003): XBOT ID:1(1)-Z Axis control error(0.522612) out of limit(mm)=0.5
UTC:2022/01/18 01:01:18.102:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.47739(mm)
UTC:2022/01/18 01:01:18.289:PMC tracking error (3010003): XBOT ID:1(1)-X Axis control error(-5.03246) out of limit(mm)=5
UTC:2022/01/18 01:01:18.289:XBOT ID:1-X Axis---Ref=157.252(mm);Fb=162.219(mm)
UTC:2022/01/18 01:01:18.313:PMC error (2001001):Flyway 1 was shutdown due to flyway error(10-0)!
UTC:2022/01/18 01:01:19.370:PMC tracking error (3010005): XBOT ID:1(1)-X Axis control error(-10.3184) out of limit(mm)=10
UTC:2022/01/18 01:01:19.370:XBOT ID:1-X Axis---Ref=150.134(mm);Fb=160.452(mm)
UTC:2022/01/18 01:01:19.370:PMC tracking error (3015005): XBOT ID:1(1)-Rz Axis control error(446.101) out of limit(mrad)=150
UTC:2022/01/18 01:01:19.370:XBOT ID:1-Rz Axis---Ref=1675.52(mrad);Fb=1229.42(mrad)
UTC:2022/01/18 01:01:20.701:Flyway 1---PMC error (200100c): 12V (11.99V) under voltage error!
UTC:2022/01/18 01:01:20.701:Flyway 1---PMC error (2001012): PMNET synchronization error!
UTC:2022/01/18 01:01:35.238:PMC error (2001001):Flyway 1 was shutdown due to flyway error(10-0)!
UTC:2022/01/18 01:01:37.559:Flyway 1---PMC error (200100c): 12V (11.968V) under voltage error!
UTC:2022/01/18 01:01:37.559:Flyway 1---PMC error (2001012): PMNET synchronization error!
UTC:2022/01/18 01:03:54.342:PMC error (2001001):Flyway 1 was shutdown due to flyway error(10-0)!
UTC:2022/01/18 01:03:54.347:PMC tracking error (3010003): XBOT ID:1(1)-X Axis control error(-5.07246) out of limit(mm)=5
UTC:2022/01/18 01:03:54.347:XBOT ID:1-X Axis---Ref=153.037(mm);Fb=158.042(mm)
UTC:2022/01/18 01:03:54.387:PMC tracking error (3012005): XBOT ID:1(1)-Z Axis control error(3.01444) out of limit(mm)=3
UTC:2022/01/18 01:03:54.387:XBOT ID:1-Z Axis---Ref=3(mm);Fb=-0.0144414(mm)
UTC:2022/01/18 01:03:55.739:Flyway 1---PMC error (200100c): 12V (11.9827V) under voltage error!
UTC:2022/01/18 01:03:55.739:Flyway 1---PMC error (2001012): PMNET synchronization error!
UTC:2022/01/18 18:04:28.048:PMC tracking error (3015003): XBOT ID:1(1)-Rz Axis control error(-30.1815) out of limit(mrad)=30
UTC:2022/01/18 18:04:28.048:XBOT ID:1-Rz Axis---Ref=1765.24(mrad);Fb=1795.42(mrad)
UTC:2022/01/18 18:04:28.225:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-21.2983) out of limit(mrad)=20
UTC:2022/01/18 18:04:28.225:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.94(mrad)
UTC:2022/01/18 18:04:29.429:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.7032) out of limit(mrad)=20
UTC:2022/01/18 18:04:29.429:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.35(mrad)
UTC:2022/01/18 18:04:29.630:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.8138) out of limit(mrad)=20
UTC:2022/01/18 18:04:29.630:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.46(mrad)
UTC:2022/01/18 18:04:29.841:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.2569) out of limit(mrad)=20
UTC:2022/01/18 18:04:29.841:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1785.9(mrad)
UTC:2022/01/18 18:04:29.055:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.2492) out of limit(mrad)=20
UTC:2022/01/18 18:04:29.055:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1785.9(mrad)
UTC:2022/01/18 18:04:29.264:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.5582) out of limit(mrad)=20
UTC:2022/01/18 18:04:29.264:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.2(mrad)
UTC:2022/01/18 18:04:30.473:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.8787) out of limit(mrad)=20
UTC:2022/01/18 18:04:30.473:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.53(mrad)
UTC:2022/01/18 18:04:30.684:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.3408) out of limit(mrad)=20
UTC:2022/01/18 18:04:30.684:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1785.99(mrad)
UTC:2022/01/18 18:04:30.892:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.7795) out of limit(mrad)=20
UTC:2022/01/18 18:04:30.892:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.43(mrad)
UTC:2022/01/18 18:04:30.082:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.6422) out of limit(mrad)=20
UTC:2022/01/18 18:04:30.082:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.29(mrad)
UTC:2022/01/18 18:04:30.276:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.604) out of limit(mrad)=20
UTC:2022/01/18 18:04:30.276:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.25(mrad)
UTC:2022/01/18 18:04:31.475:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.4209) out of limit(mrad)=20
UTC:2022/01/18 18:04:31.475:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.07(mrad)
UTC:2022/01/18 18:04:31.656:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.0089) out of limit(mrad)=20
UTC:2022/01/18 18:04:31.656:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1785.66(mrad)
UTC:2022/01/18 18:04:31.838:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.5086) out of limit(mrad)=20
UTC:2022/01/18 18:04:31.838:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.16(mrad)
UTC:2022/01/18 18:04:31.017:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.5048) out of limit(mrad)=20
UTC:2022/01/18 18:04:31.017:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.15(mrad)
UTC:2022/01/18 18:04:31.194:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.2645) out of limit(mrad)=20
UTC:2022/01/18 18:04:31.194:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1785.91(mrad)
UTC:2022/01/18 18:04:32.382:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.1577) out of limit(mrad)=20
UTC:2022/01/18 18:04:32.382:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1785.8(mrad)
UTC:2022/01/18 18:04:33.840:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.0814) out of limit(mrad)=20
UTC:2022/01/18 18:04:33.840:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1785.73(mrad)
UTC:2022/01/18 18:04:34.335:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.6383) out of limit(mrad)=20
UTC:2022/01/18 18:04:34.335:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.28(mrad)
UTC:2022/01/18 18:04:34.543:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.337) out of limit(mrad)=20
UTC:2022/01/18 18:04:34.543:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1785.98(mrad)
UTC:2022/01/18 18:04:34.749:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-21.3326) out of limit(mrad)=20
UTC:2022/01/18 18:04:34.749:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.98(mrad)
UTC:2022/01/18 18:04:34.943:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.2225) out of limit(mrad)=20
UTC:2022/01/18 18:04:34.943:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1785.87(mrad)
UTC:2022/01/18 18:04:34.121:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.0852) out of limit(mrad)=20
UTC:2022/01/18 18:04:34.121:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1785.73(mrad)
UTC:2022/01/18 18:04:35.331:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.2035) out of limit(mrad)=20
UTC:2022/01/18 18:04:35.331:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1785.85(mrad)
UTC:2022/01/18 18:04:35.534:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.1272) out of limit(mrad)=20
UTC:2022/01/18 18:04:35.534:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1785.77(mrad)
UTC:2022/01/18 18:04:35.714:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.5582) out of limit(mrad)=20
UTC:2022/01/18 18:04:35.714:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.2(mrad)
UTC:2022/01/18 18:04:35.918:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.2683) out of limit(mrad)=20
UTC:2022/01/18 18:04:35.918:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1785.91(mrad)
UTC:2022/01/18 18:04:35.325:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.5926) out of limit(mrad)=20
UTC:2022/01/18 18:04:35.325:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.24(mrad)
UTC:2022/01/18 18:04:36.513:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.6727) out of limit(mrad)=20
UTC:2022/01/18 18:04:36.513:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.32(mrad)
UTC:2022/01/18 18:04:36.703:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.8634) out of limit(mrad)=20
UTC:2022/01/18 18:04:36.703:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.51(mrad)
UTC:2022/01/18 18:04:36.882:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.7528) out of limit(mrad)=20
UTC:2022/01/18 18:04:36.882:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.4(mrad)
UTC:2022/01/18 18:04:36.065:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.0204) out of limit(mrad)=20
UTC:2022/01/18 18:04:36.065:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1785.67(mrad)
UTC:2022/01/18 18:04:36.249:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.4591) out of limit(mrad)=20
UTC:2022/01/18 18:04:36.249:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.11(mrad)
UTC:2022/01/18 18:04:37.432:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.8634) out of limit(mrad)=20
UTC:2022/01/18 18:04:37.432:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.51(mrad)
UTC:2022/01/18 18:04:37.614:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.028) out of limit(mrad)=20
UTC:2022/01/18 18:04:37.614:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1785.67(mrad)
UTC:2022/01/18 18:04:37.796:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.4819) out of limit(mrad)=20
UTC:2022/01/18 18:04:37.796:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.13(mrad)
UTC:2022/01/18 18:04:37.981:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-21.0618) out of limit(mrad)=20
UTC:2022/01/18 18:04:37.981:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.71(mrad)
UTC:2022/01/18 18:04:37.163:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.0928) out of limit(mrad)=20
UTC:2022/01/18 18:04:37.163:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1785.74(mrad)
UTC:2022/01/18 18:04:37.347:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.5201) out of limit(mrad)=20
UTC:2022/01/18 18:04:37.347:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1786.17(mrad)
UTC:2022/01/18 18:04:38.531:PMC tracking error (3015004): XBOT ID:1(1)-Rz Axis control error(-20.3141) out of limit(mrad)=20
UTC:2022/01/18 18:04:38.531:XBOT ID:1-Rz Axis---Ref=1765.65(mrad);Fb=1785.96(mrad)
UTC:2022/01/18 18:04:38.793:PMC error (2001001):Flyway 1 was shutdown due to flyway error(10-0)!
UTC:2022/01/18 18:04:38.095:PMC tracking error (3012003): XBOT ID:1(1)-Z Axis control error(-0.502177) out of limit(mm)=0.5
UTC:2022/01/18 18:04:38.095:XBOT ID:1-Z Axis---Ref=0.124(mm);Fb=0.626177(mm)
UTC:2022/01/18 18:04:39.150:Flyway 1---PMC error (200100c): 12V (11.979V) under voltage error!
UTC:2022/01/18 18:04:39.150:Flyway 1---PMC error (2001012): PMNET synchronization error!
UTC:2022/01/18 18:05:11.837:PMC tracking error (3012003): XBOT ID:1(1)-Z Axis control error(-1.11025) out of limit(mm)=0.5
UTC:2022/01/18 18:05:11.837:XBOT ID:1-Z Axis---Ref=1(mm);Fb=2.11025(mm)
UTC:2022/01/18 18:05:11.837:PMC tracking error (3015005): XBOT ID:1(1)-Rz Axis control error(1606.81) out of limit(mrad)=150
UTC:2022/01/18 18:05:11.837:XBOT ID:1-Rz Axis---Ref=1570.8(mrad);Fb=-36.0141(mrad)
UTC:2022/01/18 18:05:11.848:PMC error (2001001):Flyway 1 was shutdown due to flyway error(10-0)!
UTC:2022/01/18 18:05:12.280:Flyway 1---PMC error (200100c): 12V (11.99V) under voltage error!
UTC:2022/01/18 18:05:12.280:Flyway 1---PMC error (2001012): PMNET synchronization error!
UTC:2022/01/18 18:05:42.656:PMC tracking error (3012003): XBOT ID:1(1)-Z Axis control error(-1.11117) out of limit(mm)=0.5
UTC:2022/01/18 18:05:42.656:XBOT ID:1-Z Axis---Ref=1(mm);Fb=2.11117(mm)
UTC:2022/01/18 18:05:42.656:PMC tracking error (3015005): XBOT ID:1(1)-Rz Axis control error(1606.78) out of limit(mrad)=150
UTC:2022/01/18 18:05:42.656:XBOT ID:1-Rz Axis---Ref=1570.8(mrad);Fb=-35.9797(mrad)
UTC:2022/01/18 18:05:42.667:PMC error (2001001):Flyway 1 was shutdown due to flyway error(10-0)!
UTC:2022/01/18 18:05:43.099:Flyway 1---PMC error (200100c): 12V (11.9864V) under voltage error!
UTC:2022/01/18 18:05:43.099:Flyway 1---PMC error (2001012): PMNET synchronization error!
UTC:2022/01/19 20:04:24.075:PMC error (2001001):Flyway 1 was shutdown due to flyway error(10-0)!
UTC:2022/01/19 20:04:24.075:PMC tracking error (3012004): XBOT ID:1(1)-Z Axis control error(0.342763) out of limit(mm)=0.3
UTC:2022/01/19 20:04:24.075:XBOT ID:1-Z Axis---Ref=3(mm);Fb=2.65724(mm)
UTC:2022/01/19 20:04:25.187:PMC tracking error (3012003): XBOT ID:1(1)-Z Axis control error(-0.500135) out of limit(mm)=0.5
UTC:2022/01/19 20:04:25.187:XBOT ID:1-Z Axis---Ref=-0.305056(mm);Fb=0.195079(mm)
UTC:2022/01/19 20:04:26.505:Flyway 1---PMC error (200100e): CPU temperature (89.4512 C) error!
UTC:2022/01/19 20:04:26.505:Flyway 1---PMC error (2001012): PMNET synchronization error!
